Feature-oriented scanning
Feature-oriented scanning (FOS) is a method of precision measurement of surface topography with a
Topography
Any topography element that looks like a hill or a pit in wide sense may be taken as a surface feature. Examples of surface features (objects) are:
FOS is designed for high-precision measurement of surface topography (see Fig.) as well as other surface properties and characteristics. Moreover, in comparison with the conventional scanning, FOS allows obtaining a higher spatial resolution. Thanks to a number of techniques embedded in FOS, the distortions caused by thermal drifts and creeps are practically eliminated.
Applications
FOS has the following fields of application: surface metrology, precise probe positioning, automatic surface characterization, automatic surface modification/stimulation, automatic manipulation of nanoobjects, nanotechnological processes of “bottom-up” assembly, coordinated control of analytical and technological probes in multiprobe instruments, control of atomic/molecular assemblers, control of probe nanolithographs, etc.
See also
References
1. R. V. Lapshin (2004). "Feature-oriented scanning methodology for probe microscopy and nanotechnology" (PDF). Nanotechnology. 15 (9). UK: IOP: 1135–1151.
2. R. V. Lapshin (2007). "Automatic drift elimination in probe microscope images based on techniques of counter-scanning and topography feature recognition" (PDF). Measurement Science and Technology. 18 (3). UK: IOP: 907–927.
3. R. V. Lapshin (2011). "Feature-oriented scanning probe microscopy" (PDF). In H. S. Nalwa (ed.). Encyclopedia of Nanoscience and Nanotechnology. Vol. 14. USA: American Scientific Publishers. pp. 105–115.
4. R. Lapshin (2014). "Feature-oriented scanning probe microscopy: precision measurements, nanometrology, bottom-up nanotechnologies". Electronics: Science, Technology, Business (Special issue “50 years of the Institute of Physical Problems”). Russian Federation: Technosphera Publishers: 94–106.
5. R. V. Lapshin (2015). "Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Approach description" (PDF). Applied Surface Science. 359. Netherlands: Elsevier B. V.: 629–636.
6. R. V. Lapshin (2016). "Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Virtual mode" (PDF). Applied Surface Science. 378. Netherlands: Elsevier B. V.: 530–539.
7. R. V. Lapshin (2019). "Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode". Applied Surface Science. 470. Netherlands: Elsevier B. V.: 1122–1129.
8. R. V. Lapshin (2009). "Availability of feature-oriented scanning probe microscopy for remote-controlled measurements on board a space laboratory or planet exploration rover" (PDF). Astrobiology. 9 (5). USA: Mary Ann Liebert: 437–442.
9. R. V. Lapshin (2014). "Observation of a hexagonal superstructure on pyrolytic graphite by method of feature-oriented scanning tunneling microscopy" (PDF). Proceedings of the 25th Russian Conference on Electron Microscopy (SEM-2014) (in Russian). Vol. 1. June 2–6, Chernogolovka, Russia: Russian Academy of Sciences. pp. 316–317. {{cite conference}}
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10. D. W. Pohl, R. Möller (1988). ""Tracking" tunneling microscopy". Review of Scientific Instruments. 59 (6). USA: AIP Publishing: 840–842.
11. B. S. Swartzentruber (1996). "Direct measurement of surface diffusion using atom-tracking scanning tunneling microscopy". Physical Review Letters. 76 (3). USA: American Physical Society: 459–462.
12. S. B. Andersson, D. Y. Abramovitch (2007). "A survey of non-raster scan methods with application to atomic force microscopy". Proceedings of the American Control Conference (ACC '07). July 9–13, New York, USA: IEEE. pp. 3516–3521. {{cite conference}}
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External links
- Feature-oriented scanning, Research section, Lapshin's Personal Page on SPM & Nanotechnology