File:EUV defect edge extension.JPG

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EUV_defect_edge_extension.JPG(416 × 318 pixels, file size: 21 KB, MIME type: image/jpeg)

Summary

Description
English: The loss in reflectivity due to the slope corresponding to a defect edge. Outside the sloped region, the surface is assumed flat, giving the full reflectivity of the multilayer (angle of incidence is 6 degrees). Within the sloped region, the tilt results in incident light at the wrong angle of incidence, which reduces the multilayer reflectivity as the light deviates further from normal incidence. The reference data for multilayer reflectivity vs. angle of incidence was obtained at the CXRO web site. The multilayer consists of 40 6.9 nm periods containing Si (60%) on Mo (40%) on an SiO2 substrate.
Date 22 June 2008 (original upload date)
Source Transferred from en.wikipedia to Commons.
Author Guiding light at English Wikipedia

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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2008-06-22 11:05 416×318× (21248 bytes) Guiding light The loss in reflectivity due to the slope corresponding to a defect edge. Outside the sloped region, the surface is assumed flat, giving the full reflectivity. Within the sloped region, the tilt results in incident light at the wrong angle of incidence, w

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22 June 2008

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Date/TimeThumbnailDimensionsUserComment
current10:06, 28 February 2016Thumbnail for version as of 10:06, 28 February 2016416 × 318 (21 KB)FastilyCloneTransferred from enwp
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