Ion beam-assisted deposition
Ion beam assisted deposition (IBAD or IAD) is a
cubic boron nitride
(c-BN), can only be formed in thin films when bombarded with energetic ions during the deposition process.
See also
References
- Kester, Daniel J.; Messier, Russell (15 July 1992). "Phase control of cubic boron nitride thin films". Journal of Applied Physics. 72 (2). AIP Publishing: 504–513. ISSN 0021-8979.
- 4wave Inc.'s Ion beam deposition page with diagram of a typical IBD system
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