Magnetolithography
Magnetolithography (ML) is a
ML can be used for applying either a positive or negative approach. In the positive approach, the magnetic nanoparticles react chemically or interact via chemical recognition with the substrate. Hence, the magnetic nanoparticles are immobilized at selected locations, where the mask induces a magnetic field, resulting in a patterned substrate. In the negative approach, the magnetic nanoparticles are inert to the substrate. Hence, once they pattern the substrate, they block their binding site on the substrate from reacting with another reacting agent. After the adsorption of the reacting agent, the nanoparticles are removed, resulting in a negatively patterned substrate.
ML is also a backside lithography, which has the advantage of ease in producing multilayer with high accuracy of alignment and with the same efficiency for all layers.
References
- Bardea, Amos; Burshtein, Noa; Rudich, Yinon; Salame, Tomer; Ziv, Carmit; Yarden, Oded; Naaman, Ron (2011-12-15). "Sensitive Detection and Identification of DNA and RNA Using a Patterned Capillary Tube". Analytical Chemistry. 83 (24). American Chemical Society (ACS): 9418–9423. PMID 22039991.
- Bardea, Amos; Naaman, Ron (2010). "Magnetolithography". Advances in Imaging and Electron Physics. Vol. 164. Elsevier. pp. 1–27. ISSN 1076-5670.
- Kumar, Tatikonda Anand; Bardea, Amos; Shai, Yechiel; Yoffe, Alexander; Naaman, Ron (2010-06-09). "Patterning Gradient Properties from Sub-Micrometers to Millimeters by Magnetolithography". Nano Letters. 10 (6). American Chemical Society (ACS): 2262–2267. PMID 20491500.
- Bardea, Amos; Baram, Aviad; Tatikonda, Anand Kumar; Naaman, Ron (2009-12-30). "Magnetolithographic Patterning of Inner Walls of a Tube: A New Dimension in Microfluidics and Sequential Microreactors". Journal of the American Chemical Society. 131 (51). American Chemical Society (ACS): 18260–18262. PMID 19961172.
- Bardea, Amos; Naaman, Ron (2009-05-19). "Submicrometer Chemical Patterning with High Throughput Using Magnetolithography". Langmuir. 25 (10). American Chemical Society (ACS): 5451–5454. PMID 19382781.
- Bardea, Amos; Naaman, Ron (2009-02-06). "Magnetolithography: From Bottom-Up Route to High Throughput". Small. 5 (3). Wiley: 316–319. PMID 19123174.