Microoptoelectromechanical systems
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Microoptoelectromechanical systems (MOEMS), also known as optical
Merging technologies
MOEMS includes two major technologies, microelectromechanical systems and micro-optics. Both these two technologies independently involve in batch processing similar to integrated circuits, and micromachining similar to fabrication of microsensor.
History of MOEMS
During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both
In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major microtechnologies; namely micro-optics, micromechanics, and microelectronics.[1]
See also
References
- S2CID 116492415.
Bibliography
- Rai-Choudhury, P., ed. (2000). MEMS and MOEMS. Technology and applications. SPIE Press. ISBN 978-0-8194-3716-7.
- Solgaard, O.; Godil, A.A.; Howe, R.T.; Lee, L.P.; Peter, Y.-A.; Zappe, H. (June 2014). "Optical MEMS: From micromirrors to complex systems". IEEE Journal of Microelectromechanical Systems. 23 (3): 517–538. .