Trifluorosilane
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| Names | |||
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| IUPAC name
Trifluorosilane
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| Identifiers | |||
3D model (
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CompTox Dashboard (EPA)
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| Properties | |||
| HF3Si | |||
| Molar mass | 86.09 g/mol | ||
| Appearance | Colorless gas | ||
| Density | 1.86 g/cm3 | ||
| Melting point | −131 °C (−204 °F; 142 K) | ||
| Boiling point | −97.5 °C (−143.5 °F; 175.7 K) | ||
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Trifluorosilane is the
is often also referred to as trifluorosilane, although more properly referred to as trifluorosilyl.Preparation
Trifluorosilane has been purified and separated by low-temperature high-vacuum distillation. One preparation method involves products of the reaction between SbF3 and HSiCl3.[2] HSiCl3 is obtained by copper catalyzed reaction between HCl and Silicon at 200-400 °C.
Formation has also been reported in certain etching operations of silicon.[3]
Properties
The electric dipole moment of trifluorosilane is 1.26 debye.[4] The length of the silicon to fluorine bond is 1.555 Å, Si-H length is 1.55 Å, and ∠FSiF is 110°.[5]
References
- ISBN 9781439814628.
- ISBN 9780470145388.
- ISSN 1434-1948. Retrieved 2014-08-27.
- .
- .
Further reading
- Demaison, J.; Margulès, L.; Breidung, J.; Thiel, W.; Bürger, H. (10 November 1999). "Ab initio anharmonic force field, spectroscopic parameters and equilibrium structure of trifluorosilane". Molecular Physics. 97 (9): 1053–1067. .